Invention Grant
- Patent Title: Vacuum chamber AC/DC probe
- Patent Title (中): 真空室AC / DC探头
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Application No.: US11893761Application Date: 2007-08-17
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Publication No.: US07659742B1Publication Date: 2010-02-09
- Inventor: Steven Jacobson , Duc huu Nguyen , Zachary Gemmill
- Applicant: Steven Jacobson , Duc huu Nguyen , Zachary Gemmill
- Applicant Address: US CA Santa Clara
- Assignee: National Semiconductor Corporation
- Current Assignee: National Semiconductor Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Dergosits & Noah LLP
- Main IPC: G01R31/26
- IPC: G01R31/26
Abstract:
Features of non-vacuum AC/DC probe systems are combined with features of the DC vacuum chamber testers to provide an AC/DC probe system that can be used in a vacuum environment, such as a SEM vacuum chamber. Features of the DC vacuum chamber tester are modified to include new op-amp circuitry that provides the AC/DC testing functionality of the non-vacuum chamber systems, resulting in an AC/DC probe system that can be used in a vacuum environment.
Public/Granted literature
- US3121062A Vapor phase crystallization Public/Granted day:1964-02-11
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