Invention Grant
- Patent Title: Apparatus and method for probing integrated circuits using polarization difference probing
- Patent Title (中): 使用偏振差探测探测集成电路的装置和方法
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Application No.: US11261996Application Date: 2005-10-27
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Publication No.: US07659981B2Publication Date: 2010-02-09
- Inventor: William Lo , Kenneth Wilsher , Nagamani Nataraj , Nina Boiadjieva
- Applicant: William Lo , Kenneth Wilsher , Nagamani Nataraj , Nina Boiadjieva
- Applicant Address: US CA Fremont
- Assignee: DCG Systems, Inc.
- Current Assignee: DCG Systems, Inc.
- Current Assignee Address: US CA Fremont
- Agency: Nixon Peabody LLP
- Agent Joseph Bach, Esq.
- Main IPC: G01B11/00
- IPC: G01B11/00

Abstract:
A system for probing a DUT is disclosed, the system having a pulsed laser source, a CW laser source, beam optics designed to point a reference beam and a probing beam at the same location on the DUT, optical detectors for detecting the reflected reference and probing beams, and a collection electronics. The beam optics is a common-path polarization differential probing (PDP) optics. The common-path PDP optics divides the incident laser beam into two beams of orthogonal polarization—one beam simulating a reference beam while the other simulating a probing beam. Both reference and probing beams are pointed to the same location on the DUT. Due to the intrinsic asymmetry of a CMOS transistor, the interaction of the reference and probing beams with the DUT result in different phase modulation in each beam. This difference can be investigated to study the response of the DUT to the stimulus signal.
Public/Granted literature
- US20070046947A1 Laser probing system for integrated circuits Public/Granted day:2007-03-01
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