Invention Grant
US07660646B2 System and method providing control of reticle stocking and sorting
失效
系统和方法提供光栅放样和分选的控制
- Patent Title: System and method providing control of reticle stocking and sorting
- Patent Title (中): 系统和方法提供光栅放样和分选的控制
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Application No.: US10810932Application Date: 2004-03-26
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Publication No.: US07660646B2Publication Date: 2010-02-09
- Inventor: Yao-Chin Lee , Chia-Yun Tsao , Chih-Yee Chen
- Applicant: Yao-Chin Lee , Chia-Yun Tsao , Chih-Yee Chen
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Thomas, Kayden, Horstemeyer & Risley
- Main IPC: G06F7/00
- IPC: G06F7/00 ; G06F19/00

Abstract:
A reticle stocking and sorting system. The reticle management system comprises first reticle storage, second reticle storage, third reticle storage, and a host system. The first reticle storage stores a first reticle currently in use. The second reticle storage stores a second reticle not currently in use. The third reticle storage stores a third unused reticle temporarily before it is disposed of. The host system is adapted to rearrange the first, second, and third reticles among the first, second, and third reticle storages, based on demand data pertaining to a product requiring least one article during fabrication.
Public/Granted literature
- US20050216117A1 System and method providing control of reticle stocking and sorting Public/Granted day:2005-09-29
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