Invention Grant
- Patent Title: Surface-profile measuring instrument
- Patent Title (中): 表面轮廓测量仪
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Application No.: US11896903Application Date: 2007-09-06
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Publication No.: US07660688B2Publication Date: 2010-02-09
- Inventor: Nobuhiro Ishikawa , Shingo Kiyotani
- Applicant: Nobuhiro Ishikawa , Shingo Kiyotani
- Applicant Address: JP Kawasaki-shi
- Assignee: Mitutoyo Corporation
- Current Assignee: Mitutoyo Corporation
- Current Assignee Address: JP Kawasaki-shi
- Agency: Oliff & Berridge, PLC
- Priority: JP2006-243376 20060907; JP2007-216380 20070822
- Main IPC: G01C17/38
- IPC: G01C17/38 ; G01B5/004 ; G01N19/02

Abstract:
A surface-profile measuring instrument includes a movement-estimating unit that estimates a movement state of a drive mechanism in accordance with a scanning vector command issued by a scanning vector commanding unit to calculate an estimated movement state quantity, and a correction calculating unit that corrects a detection value of a drive sensor in accordance with the estimated movement state quantity calculated by the movement-estimating unit. The movement-estimating unit has a nominal model setting unit in which a nominal model from the scanning vector commanding unit to the probe is set. The correction calculating unit includes a correction-amount calculating unit that calculates a correction amount for correcting a measurement error generated by a deformation of the drive mechanism in accordance with the movement thereof and a measurement data synthesizing unit that synthesizes the detection value of the drive sensor and the displacement sensor and the calculated correction-amount calculated by the correction-amount calculating unit.
Public/Granted literature
- US20080065341A1 Surface-profile measuring instrument Public/Granted day:2008-03-13
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