Invention Grant
- Patent Title: Quartz glass having excellent resistance against plasma corrosion and method for producing the same
- Patent Title (中): 具有优异的等离子体腐蚀性的石英玻璃及其制造方法
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Application No.: US12003353Application Date: 2007-12-21
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Publication No.: US07661277B2Publication Date: 2010-02-16
- Inventor: Tatsuhiro Sato , Nobumasa Yoshida , Mamoru Endo
- Applicant: Tatsuhiro Sato , Nobumasa Yoshida , Mamoru Endo
- Applicant Address: JP Tokyo
- Assignee: Shin-Etsu Quartz Products Co., Ltd.
- Current Assignee: Shin-Etsu Quartz Products Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Radar, Fishman & Grauer PLLC
- Priority: JP2004-288407 20040930
- Main IPC: C03B19/00
- IPC: C03B19/00 ; C03B20/00 ; C03C3/00 ; C03C3/06 ; B32B17/06 ; B32B18/00

Abstract:
As a jig material to use under plasma reaction for producing semiconductors, the present invention provides a quartz glass having resistance against plasma corrosion, particularly corrosion resistance against fluorine-based plasma gases, and which is usable without causing anomalies to silicon wafers; the present invention furthermore provides a quartz glass jig, and a method for producing the same. A quartz glass containing 0.1 to 20 wt % in total of two or more types of metallic elements, said metallic elements comprising at least one type of metallic element selected from Group 3B of the periodic table as a first metallic element and at least one type of metallic element selected from the group consisting of Mg, Ca, Sr, Ba, Sc, Y, Ti, Zr, Hf, lanthanoids, and actinoids as a second metallic element, provided that the maximum concentration of each of the second metallic elements is 1.0 wt % or less.
Public/Granted literature
- US20080113174A1 Quartz glass having excellent resistance against plasma corrosion and method for producing the same Public/Granted day:2008-05-15
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