Invention Grant
US07661318B2 Stress isolated pressure sensing die, sensor assembly inluding said die and methods for manufacturing said die and said assembly
有权
应力隔离压力感测模具，包括所述模具的传感器组件和用于制造所述模具和所述组件的方法
- Patent Title: Stress isolated pressure sensing die, sensor assembly inluding said die and methods for manufacturing said die and said assembly
- Patent Title (中): 应力隔离压力感测模具，包括所述模具的传感器组件和用于制造所述模具和所述组件的方法
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Application No.: US11903871Application Date: 2007-09-25
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Publication No.: US07661318B2Publication Date: 2010-02-16
- Inventor: Amnon Brosh , Sebastiano Brida
- Applicant: Amnon Brosh , Sebastiano Brida
- Applicant Address: FR Bourges
- Assignee: Auxitrol S.A.
- Current Assignee: Auxitrol S.A.
- Current Assignee Address: FR Bourges
- Agency: Blakely, Sokoloff, Taylor & Zafman
- Main IPC: G01L7/08
- IPC: G01L7/08
Abstract:
The invention concerns a pressure sensing die to be mounted on a base, comprising: a diaphragm structure with a deflectable pressure sensing diaphragm whose deflection is representative of the pressure and sensing elements for detecting the deflection of the sensing diaphragm; a pedestal supporting the diaphragm structure; wherein the pedestal is a composite pedestal comprising top and bottom platforms connected by at least one small link having a mean cross-section smaller than the cross-section of the top platform, said small link isolating at least some of the stresses, produced by the mounting of the pressure sensing die on the base, from said deflectable pressure sensing diaphragm.
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