Invention Grant
US07661794B2 Electrostatic actuator, droplet discharge head, method for driving droplet discharge head, and method for manufacturing electrostatic actuator
失效
静电致动器,液滴喷射头,用于驱动液滴喷射头的方法以及用于制造静电致动器的方法
- Patent Title: Electrostatic actuator, droplet discharge head, method for driving droplet discharge head, and method for manufacturing electrostatic actuator
- Patent Title (中): 静电致动器,液滴喷射头,用于驱动液滴喷射头的方法以及用于制造静电致动器的方法
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Application No.: US11497034Application Date: 2006-07-31
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Publication No.: US07661794B2Publication Date: 2010-02-16
- Inventor: Yoshifumi Hano , Masahiro Fujii
- Applicant: Yoshifumi Hano , Masahiro Fujii
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2005-223216 20050801; JP2005-223217 20050801; JP2005-223218 20050801; JP2006-161130 20060609
- Main IPC: B41J2/045
- IPC: B41J2/045 ; B41J2/055

Abstract:
To provide an electrostatic actuator capable of attaining a large diaphragm displacement by low voltage drive. Furthermore, a droplet discharge head provided with this electrostatic actuator, a method for driving a droplet discharge head, and a method for manufacturing an electrostatic actuator are provided. A diaphragm, an individual electrode facing the diaphragm with a gap therebetween, while a voltage is applied between the diaphragm and the individual electrode, and an insulating film which is disposed on a surface of the diaphragm, the surface facing the individual electrode, are included, wherein the insulating film is converted to an electret.
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