Invention Grant
- Patent Title: Discontinuous conveyor system
- Patent Title (中): 不连续输送机系统
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Application No.: US11238030Application Date: 2005-09-28
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Publication No.: US07661919B2Publication Date: 2010-02-16
- Inventor: Anthony C. Bonora , Ted Rogers
- Applicant: Anthony C. Bonora , Ted Rogers
- Applicant Address: JP Kyoto
- Assignee: Muratec Automation Co., Ltd.
- Current Assignee: Muratec Automation Co., Ltd.
- Current Assignee Address: JP Kyoto
- Agency: Fish & Richardson P.C.
- Main IPC: H01L21/677
- IPC: H01L21/677
Abstract:
The present invention generally comprises a transport system for transporting containers throughout a fabrication facility, and more specifically through a tool bay in the fabrication facility. The present invention generally includes a first container transport system for transporting a container from an interbay conveyor towards the first tool bay, a second container transport system for moving a container away from the first tool bay and a tool loading device to move containers between the first and second container transport systems and a load port. A merged return conveyor for transporting a container between the second container transport system and the interbay conveyor may also be included.
Public/Granted literature
- US20070081879A1 Discontinuous conveyor system Public/Granted day:2007-04-12
Information query
IPC分类:
