Invention Grant
US07662007B2 Method of fabricating sealing substrate 有权
密封基板的制造方法

Method of fabricating sealing substrate
Abstract:
A sealing substrate has first and second substrates. A hollow portion is formed in a first surface of the first substrate. The first substrate has a plate portion that forms a bottom surface of a hollow portion and a frame portion that forms an inner wall surface of the hollow portion. The second substrate is affixed to a second surface of the first substrate. The second substrate is formed of a material having a lower specific gravity than that of the first substrate.
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