Invention Grant
- Patent Title: Lifting and supporting device
- Patent Title (中): 起重支撑装置
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Application No.: US10484174Application Date: 2002-07-15
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Publication No.: US07662302B2Publication Date: 2010-02-16
- Inventor: Mustapha Elyaakoubi , Jacques Schmitt
- Applicant: Mustapha Elyaakoubi , Jacques Schmitt
- Applicant Address: CH Trubbach
- Assignee: Oerlikon Solar IP AG, Trubbach
- Current Assignee: Oerlikon Solar IP AG, Trubbach
- Current Assignee Address: CH Trubbach
- Agency: Price, Heneveld, Cooper, DeWitt & Litton, LLP
- Priority: DE10134513 20010716
- International Application: PCT/EP02/07856 WO 20020715
- International Announcement: WO03/008323 WO 20030130
- Main IPC: B44C1/22
- IPC: B44C1/22 ; C23C16/00 ; C23F1/00

Abstract:
The invention relates to a lifting and supporting device for handling and positioning particularly large-surface elements in the shape of panels, especially in plasma processing installations. Said lifting and supporting device comprises a particularly metallic base plate, on which a plurality of particularly dielectric pins are arranged. Said pins may be set in pin holes especially provided in the base plate. Said panel-shaped element may be positioned on the pin end for the handling thereof or during a plasma processing. Said panel-shaped element may present an electrostatic charge. A small diameter for the pins and pin holes is selected such that, in conformity with the panel-shaped element provided with the electrostatic charge, an undesired electrostatic charge on said panel-shaped element is essentially avoided or, in conformity with the panel-shaped element to be plasma processed, a plasma perturbation in the area of the pin holes or pins is essentially avoided.
Public/Granted literature
- US20040248391A1 Lifting and supporting device Public/Granted day:2004-12-09
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