Invention Grant
- Patent Title: Method for ejecting liquid material, method for manufacturing organic electroluminescense device, and method for manufacturing color filter
- Patent Title (中): 喷射液体材料的方法,制造有机电致发光元件的方法和制造滤色器的方法
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Application No.: US12119127Application Date: 2008-05-12
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Publication No.: US07662423B2Publication Date: 2010-02-16
- Inventor: Hidetaka Hanaoka
- Applicant: Hidetaka Hanaoka
- Applicant Address: JP Tokyo
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP Tokyo
- Agency: Oliff & Berridge, PLC
- Priority: JP2007-163512 20070621
- Main IPC: C23C16/52
- IPC: C23C16/52 ; B05D5/12 ; C23C28/00

Abstract:
A method for ejecting a liquid material includes classifying the plurality of nozzles of a head into a plurality of nozzle groups having different landing position accuracies for droplets; and performing ejection includes main scanning for ejecting droplets of the liquid material through selected nozzles while generating relative movement in a main-scanning direction between the head and a target substrate, and sub-scanning for generating relative movement between the head and the target substrate in a sub-scanning direction orthogonal to the main-scanning direction. The main scanning and the sub-scanning are performed separately for each of the plurality of nozzle groups. During the sub-scanning, relative movement is generated in accordance with correction information for the corresponding nozzle group for correcting landing positions of the droplet. During the main scanning, a droplet is ejected through at least one nozzle selected from the corresponding nozzle group.
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