Invention Grant
- Patent Title: Providing photonic control over wafer borne semiconductor devices
- Patent Title (中): 提供晶圆传导半导体器件的光子控制
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Application No.: US10486666Application Date: 2002-08-12
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Publication No.: US07662650B2Publication Date: 2010-02-16
- Inventor: Michael J. Haji-Sheikh , James R. Biard , James K. Guenter , Bobby M. Hawkins
- Applicant: Michael J. Haji-Sheikh , James R. Biard , James K. Guenter , Bobby M. Hawkins
- Applicant Address: US CA Sunnyvale
- Assignee: Finisar Corporation
- Current Assignee: Finisar Corporation
- Current Assignee Address: US CA Sunnyvale
- Agency: Workman Nydegger
- International Application: PCT/US02/25663 WO 20020812
- International Announcement: WO03/017353 WO 20030227
- Main IPC: H01L21/66
- IPC: H01L21/66 ; H01L21/00 ; G01R31/26

Abstract:
Disclosed are methods for providing wafer photonic flow control to a semiconductor wafer (1700) having a substrate (1720), at least one active layer (1765) and at least one surface layer (1710). Photonic flow control can be achieved through the formation of trenches (1725) and/or insulating implants (1730) formed in said wafer (1700), whereby active regions (1760) are defined by trenches (1725) that operate as nonconductive areas (1750). Methods of and systems for wafer level burn-in (WLBI) of semiconductor devices are also disclosed. Photonic flow control at the wafer level is important when using WLBI methods and systems.
Public/Granted literature
- US20070117242A1 Providing photonic control over wafer borne semiconductor devices Public/Granted day:2007-05-24
Information query
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