Invention Grant
- Patent Title: Transparent metal shielded isolation for image sensors
- Patent Title (中): 用于图像传感器的透明金属屏蔽隔离
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Application No.: US11523697Application Date: 2006-09-20
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Publication No.: US07662657B2Publication Date: 2010-02-16
- Inventor: Chandra Mouli
- Applicant: Chandra Mouli
- Applicant Address: KY Grand Cayman
- Assignee: Aptina Imaging Corporation
- Current Assignee: Aptina Imaging Corporation
- Current Assignee Address: KY Grand Cayman
- Agency: Dickstein Shapiro LLP
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/76

Abstract:
An isolation region formed in a substrate and lined with a transparent metal layer. The isolation region provides isolation between adjacent active areas of an integrated circuit structure, for example the inventive region may provide isolation between pixels of a pixel array. Utilizing a transparent material maintains high quantum efficiency of the pixels as photons are not blocked from penetrating into the substrate. In one exemplary embodiment, a shallow trench isolation region is formed in a substrate, lined with an oxide or other dielectric, and an indium-tin-oxide shielding layer is formed over the oxide. The lined trench may then be filled with either the transparent metal material or a transparent insulating material.
Public/Granted literature
- US20070012969A1 Transparent metal shielded isolation for image sensors Public/Granted day:2007-01-18
Information query
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