Invention Grant
US07662684B2 Method for reducing poly-depletion in dual gate CMOS fabrication process
失效
减少双栅极CMOS制造工艺多元消耗的方法
- Patent Title: Method for reducing poly-depletion in dual gate CMOS fabrication process
- Patent Title (中): 减少双栅极CMOS制造工艺多元消耗的方法
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Application No.: US11364484Application Date: 2006-02-28
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Publication No.: US07662684B2Publication Date: 2010-02-16
- Inventor: Chang Yeol Lee , Deuk Sung Choi
- Applicant: Chang Yeol Lee , Deuk Sung Choi
- Applicant Address: KR Kyoungki-do
- Assignee: Hynix Semiconductor Inc.
- Current Assignee: Hynix Semiconductor Inc.
- Current Assignee Address: KR Kyoungki-do
- Agency: Ladas & Parry LLP
- Priority: KR2003-10704 20030220
- Main IPC: H01L21/8238
- IPC: H01L21/8238

Abstract:
Disclosed is a method for reducing poly-depletion in a dual gate CMOS fabrication process. The method reduces the poly-depletion in a dual gate CMOS fabrication process by increasing the doping efficiency in a gate polysilicon film. In order to increase the doping efficiency, the method employs the following four technical principles. First, the doping efficiency is increased when the dose of N+ ion implantation is increased. Second, the doping efficiency is increased when the thickness of N+ polysilicon is reduced. Third, the increase of depletion caused by the reduction of the channel width is inhibited when the EFH is adjusted to be less than 0. Fourth, the overall doping efficiency is increased when each step of polysilicon deposition and ion implantation is divided into multiple steps.
Public/Granted literature
- US20060148161A1 Method for reducing poly-depletion in dual gate CMOS fabrication process Public/Granted day:2006-07-06
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