Invention Grant
US07662687B2 Semiconductor memory having charge trapping memory cells and fabrication method thereof
失效
具有电荷捕获存储单元的半导体存储器及其制造方法
- Patent Title: Semiconductor memory having charge trapping memory cells and fabrication method thereof
- Patent Title (中): 具有电荷捕获存储单元的半导体存储器及其制造方法
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Application No.: US12110849Application Date: 2008-04-28
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Publication No.: US07662687B2Publication Date: 2010-02-16
- Inventor: Josef Willer , Thomas Mikolajick , Christoph Ludwig , Norbert Schulze , Karl Heinz Kuesters
- Applicant: Josef Willer , Thomas Mikolajick , Christoph Ludwig , Norbert Schulze , Karl Heinz Kuesters
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Agency: Dicke, Billig & Czaja, PLLC
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
A semiconductor memory having charge trapping memory cells and fabrication method thereof. The direction of current flow of each channel region of the memory transistors runs transversely with respect to the relevant word line, the bit lines are arranged on the top side of the word lines and in a manner electrically insulated from the latter, and electrically conductive local interconnects of source-drain regions are present, which are arranged in sections in interspaces between the word lines and in a manner electrically insulated from the latter and connected to the bit lines, wherein gate electrodes are arranged in trenches at least partly formed in the memory substrate.
Public/Granted literature
- US20090029512A1 SEMICONDUCTOR MEMORY HAVING CHARGE TRAPPING MEMORY CELLS AND FABRICATION METHOD THEREOF Public/Granted day:2009-01-29
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