Invention Grant
- Patent Title: 3-Dimensional flash memory device and method of fabricating the same
- Patent Title (中): 3维闪存器件及其制造方法
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Application No.: US12111633Application Date: 2008-04-29
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Publication No.: US07662720B2Publication Date: 2010-02-16
- Inventor: Sung-Min Kim , Eun-Jung Yun , Dong-Won Kim , Jae-Man Yoon
- Applicant: Sung-Min Kim , Eun-Jung Yun , Dong-Won Kim , Jae-Man Yoon
- Applicant Address: KR Yeongtong-gu, Suwon-si, Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Yeongtong-gu, Suwon-si, Gyeonggi-do
- Agency: Muir Patent Consulting, PLLC
- Priority: KR2005-0011008 20050205
- Main IPC: H01L21/311
- IPC: H01L21/311

Abstract:
In an embodiment, a 3-dimensional flash memory device includes: a gate extending in a vertical direction on a semiconductor substrate; a charge storing layer surrounding the gate; a silicon layer surrounding the charge storing layer; a channel region vertically formed in the silicon layer; and source/drain regions vertically formed on both sides of the channel region in the silicon layer. Integration can be improved by storing data in a 3-dimensional manner; a 2-bit operation can be performed by providing transistors on both sides of the gate.
Public/Granted literature
- US20080242025A1 3-DIMENSIONAL FLASH MEMORY DEVICE AND METHOD OF FABRICATING THE SAME Public/Granted day:2008-10-02
Information query
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