Invention Grant
- Patent Title: Solid-state imager and solid-state imaging apparatus having a modulated effective refractive index distribution and manufacturing method thereof
- Patent Title (中): 具有调制的有效折射率分布的固态成像器和固态成像装置及其制造方法
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Application No.: US12189971Application Date: 2008-08-12
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Publication No.: US07663084B2Publication Date: 2010-02-16
- Inventor: Kimiaki Toshikiyo , Takanori Yogo , Motonori Ishii , Toshinobu Matsuno , Kazutoshi Onozawa
- Applicant: Kimiaki Toshikiyo , Takanori Yogo , Motonori Ishii , Toshinobu Matsuno , Kazutoshi Onozawa
- Applicant Address: JP Osaka
- Assignee: Panasonic Corporation
- Current Assignee: Panasonic Corporation
- Current Assignee Address: JP Osaka
- Agency: Greenblum & Bernstein P.L.C.
- Priority: JP2005-178585 20050617
- Main IPC: H01L27/00
- IPC: H01L27/00

Abstract:
A solid-state imaging apparatus includes a plurality of unit pixels with associated microlenses arranged in a two-dimensional array. Each microlens includes a distributed index lens with a modulated effective refractive index distribution obtained by including a combination of a plurality of patterns having a concentric structure, the plurality of patterns being divided into line widths equal to or shorter than a wavelength of an incident light. At least one of the plurality of patterns includes a lower light-transmitting film having the concentric structure and a first line width and a first film thickness, and an upper light-transmitting film having the concentric structure configured on the lower light-transmitting film having a second line width and a second film thickness. The distributed index lens has a structure in which a refractive index material is dense at a center and becomes sparse gradually toward an outer side in the concentric structure.
Public/Granted literature
- US20090020840A1 SOLID-STATE IMAGING DEVICE, SOLID-STATE IMAGING APPARATUS AND MANUFACTURING METHOD THEREOF Public/Granted day:2009-01-22
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