Invention Grant
US07663084B2 Solid-state imager and solid-state imaging apparatus having a modulated effective refractive index distribution and manufacturing method thereof 有权
具有调制的有效折射率分布的固态成像器和固态成像装置及其制造方法

Solid-state imager and solid-state imaging apparatus having a modulated effective refractive index distribution and manufacturing method thereof
Abstract:
A solid-state imaging apparatus includes a plurality of unit pixels with associated microlenses arranged in a two-dimensional array. Each microlens includes a distributed index lens with a modulated effective refractive index distribution obtained by including a combination of a plurality of patterns having a concentric structure, the plurality of patterns being divided into line widths equal to or shorter than a wavelength of an incident light. At least one of the plurality of patterns includes a lower light-transmitting film having the concentric structure and a first line width and a first film thickness, and an upper light-transmitting film having the concentric structure configured on the lower light-transmitting film having a second line width and a second film thickness. The distributed index lens has a structure in which a refractive index material is dense at a center and becomes sparse gradually toward an outer side in the concentric structure.
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