Invention Grant
- Patent Title: Probe card
- Patent Title (中): 探针卡
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Application No.: US10586651Application Date: 2005-01-20
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Publication No.: US07663386B2Publication Date: 2010-02-16
- Inventor: Hisatomi Hosaka
- Applicant: Hisatomi Hosaka
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Finnegan, Henderson, Farabow, Garrett & Dunner LLP
- Priority: JP2004-012077 20040120
- International Application: PCT/JP2005/000657 WO 20050120
- International Announcement: WO2005/069019 WO 20050728
- Main IPC: G01R31/02
- IPC: G01R31/02 ; G01R31/26

Abstract:
It is an object of the present invention to realize sure electrical connection between a contactor and an object to be inspected without influenced by heat, a reduction in the pre-heating time, and an enhanced throughput.A probe card of the present invention includes a contactor, a printed wiring board, an interposer provided between the contactor and the printed wiring board to have the both in elastic and electrical contact with each other, a coupling member integrating these, and a reinforcing member reinforcing the printed wiring board integrated via the coupling member.
Public/Granted literature
- US20080258745A1 Probe Guard Public/Granted day:2008-10-23
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