Invention Grant
US07663794B2 Methods and devices for inhibiting tilting of a movable element in a MEMS device
失效
用于抑制MEMS装置中可移动元件的倾斜的方法和装置
- Patent Title: Methods and devices for inhibiting tilting of a movable element in a MEMS device
- Patent Title (中): 用于抑制MEMS装置中可移动元件的倾斜的方法和装置
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Application No.: US12014675Application Date: 2008-01-15
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Publication No.: US07663794B2Publication Date: 2010-02-16
- Inventor: William J Cummings
- Applicant: William J Cummings
- Applicant Address: US CA San Diego
- Assignee: Qualcomm MEMS Technologies, Inc.
- Current Assignee: Qualcomm MEMS Technologies, Inc.
- Current Assignee Address: US CA San Diego
- Agency: Knobbe Martens Olson & Bear LLP
- Main IPC: G02B26/08
- IPC: G02B26/08 ; G09G3/34

Abstract:
Interferometric modulators having a separable modulator architecture are disclosed having a reflective layer suspended from a flexible layer over a cavity. The interferometric modulators have one or more anti-tilt members that inhibit undesirable movement of the reflective layer, such as curling and/or tilting. The stabilization of the reflective layer by the anti-tilt members can improve the quality of the optical output of the interferometric modulators, as well as displays comprising such interferometric modulators.
Public/Granted literature
- US20080112035A1 METHODS AND DEVICES FOR INHIBITING TILTING OF A MOVABLE ELEMENT IN A MEMS DEVICE Public/Granted day:2008-05-15
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