Invention Grant
- Patent Title: MEMS device fabricated on a pre-patterned substrate
- Patent Title (中): 在预先图案化的衬底上制造的MEMS器件
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Application No.: US12104280Application Date: 2008-04-16
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Publication No.: US07664345B2Publication Date: 2010-02-16
- Inventor: Clarence Chui
- Applicant: Clarence Chui
- Applicant Address: US CA San Diego
- Assignee: Qualcomm Mems Technologies, Inc.
- Current Assignee: Qualcomm Mems Technologies, Inc.
- Current Assignee Address: US CA San Diego
- Agency: Knobbe, Martens, Olson & Bear LLP
- Main IPC: G02F1/29
- IPC: G02F1/29 ; G02B26/08 ; H01L21/71
Abstract:
A microelectromechanical systems device fabricated on a pre-patterned substrate having grooves formed therein. A lower electrode is deposited over the substrate and separated from an orthogonal upper electrode by a cavity. The upper electrode is configured to be movable to modulate light. A semi-reflective layer and a transparent material are formed over the movable upper electrode.
Public/Granted literature
- US20080192328A1 MEMS DEVICE FABRICATED ON A PRE-PATTERNED SUBSTRATE Public/Granted day:2008-08-14
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