The invention is a method of creating greater accuracies for wear compensation of a finishing tool during the finishing of workpieces, in which a reference surface is ablated by initially traversing the finishing tool over the reference surface and determining the actual wear of the finishing tool as a result of this initial feed motion of the finishing tool controlled by an NC feed program of an NC machine. The actual measured wear of the finishing tool as a result of the initial traversing feed motion over the reference surface is compared to a known empirical wear trend line for the workpiece and the feed motion of the NC feed program for the next workpiece is recalculated as a function of the comparative actual wear of the finish tool with respect to the known empirical wear trend line.