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US07665055B2 Semiconductor apparatus design method in which dummy line is placed in close proximity to signal line 有权
虚拟线设置在靠近信号线的半导体装置设计方法中

Semiconductor apparatus design method in which dummy line is placed in close proximity to signal line
Abstract:
A design method places a dummy line in floating state in a line layer of a semiconductor apparatus by using a computer. The method includes a first step of reading layout data and placing a dummy line with a longitudinal side lying in parallel with a signal line in an area where a pattern density of the signal line in a prescribed area is equal to or lower than a density lower limit, and a second step of dividing a dummy line placed in an area where a distance from the signal line is equal to or shorter than a dummy dividing distance.
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