An apparatus and a method for drying under reduced pressure using microwaves. The apparatus comprises a chamber (13) for housing an object (11), a depressurizing pump (22) connected to the chamber (13) for depressurizing the inside of the chamber (13), a microwave irradiating device (12) for irradiating microwaves to the object (11) in the chamber (13), an airflow generating device for generating an airflow in the chamber (13) by introducing a gas from the outside to the inside of the chamber (13), and a control device (35) for controlling the above components. The object (11) in the chamber (13) is dried at temperatures below a deterioration temperature of the object (11) by intermittent irradiation of the microwaves under reduced pressure while the airflow is generated around the object (11).