Invention Grant
- Patent Title: System to transfer a template transfer body between a motion stage and a docking plate
- Patent Title (中): 在运动台和对接板之间传送模板转印体的系统
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Application No.: US11211766Application Date: 2005-08-25
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Publication No.: US07665981B2Publication Date: 2010-02-23
- Inventor: Philip D. Schumaker , Angelo Fancello , Jae H. Kim , Byung-Jin Choi , Daniel A. Babbs
- Applicant: Philip D. Schumaker , Angelo Fancello , Jae H. Kim , Byung-Jin Choi , Daniel A. Babbs
- Applicant Address: US TX Austin
- Assignee: Molecular Imprints, Inc.
- Current Assignee: Molecular Imprints, Inc.
- Current Assignee Address: US TX Austin
- Agent Laura C. Wood
- Main IPC: B29C59/00
- IPC: B29C59/00
Abstract:
The present is directed towards an imprint lithography system including, inter alia, a docking plate; a motion stage having a range of motion associated therewith, the range of motion having a periphery spaced-apart from the docking plate a first distance; and a body, having first and second opposed sides spaced-apart a second distance, selectively coupled between the docking plate and the motion stage, the first distance being greater than the second distance to minimize a probability of a collision between the docking plate, the motion stage and the body while transferring the body between the docking plate and the motion stage.
Public/Granted literature
- US20070071582A1 System to transfer a template transfer body between a motion stage and a docking plate Public/Granted day:2007-03-29
Information query
