Invention Grant
US07666513B2 Adhesive of a silicon and silica composite for bonding together silicon parts
有权
用于将硅部件粘合在一起的硅和二氧化硅复合材料的粘合剂
- Patent Title: Adhesive of a silicon and silica composite for bonding together silicon parts
- Patent Title (中): 用于将硅部件粘合在一起的硅和二氧化硅复合材料的粘合剂
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Application No.: US11444560Application Date: 2006-06-01
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Publication No.: US07666513B2Publication Date: 2010-02-23
- Inventor: James E. Boyle , Raanan Zehavi , Amnon Chalzel
- Applicant: James E. Boyle , Raanan Zehavi , Amnon Chalzel
- Applicant Address: US CA Sunnyvale
- Assignee: Integrated Materials, Inc.
- Current Assignee: Integrated Materials, Inc.
- Current Assignee Address: US CA Sunnyvale
- Agent Charles S. Guenzer
- Main IPC: B32B9/04
- IPC: B32B9/04 ; B32B13/04 ; B32B17/06 ; B65D85/48 ; A47G19/08 ; F27D5/00

Abstract:
A method of joining two silicon members, the adhesive used for the method, and the joined product, especially a silicon tower for supporting multiple silicon wafers. A flowable adhesive is prepared comprising silicon particles of size less than 100 μm and preferably less than 100 nm and a silica bridging agent, such as a spin-on glass. Nano-silicon crystallites of about 20 nm size may be formed by CVD. Larger particles may be milled from virgin polysilicon. If necessary, a retardant such as a heavy, preferably water-insoluble alcohol such as terpineol is added to slow setting of the adhesive at room temperature. The mixture is applied to the joining areas. The silicon parts are assembled and annealed at a temperature sufficient to link the silica, preferably at 900° C. to 1100° C. for nano-silicon but higher for milled silicon.
Public/Granted literature
- US20060213601A1 Adhesive of a silicon and silica composite for bonding together silicon parts Public/Granted day:2006-09-28
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