Invention Grant
- Patent Title: Positive photosensitive resin composition and method for forming pattern
- Patent Title (中): 正型感光性树脂组合物及其形成方法
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Application No.: US11988557Application Date: 2006-07-11
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Publication No.: US07666573B2Publication Date: 2010-02-23
- Inventor: Masaki Okazaki , Hitoshi Ohnishi , Wataru Yamashita
- Applicant: Masaki Okazaki , Hitoshi Ohnishi , Wataru Yamashita
- Applicant Address: JP Minato-Ku, Tokyo
- Assignee: Mitsui Chemicals, Inc.
- Current Assignee: Mitsui Chemicals, Inc.
- Current Assignee Address: JP Minato-Ku, Tokyo
- Agency: Buchanan Ingersoll & Rooney PC
- Priority: JP2005-205099 20050714; JP2006-010934 20060119
- International Application: PCT/JP2006/313719 WO 20060711
- International Announcement: WO2007/007730 WO 20070118
- Main IPC: G03F7/004
- IPC: G03F7/004 ; G03F7/30

Abstract:
A positive photosensitive resin composition containing 100 parts by weight of a polyimide precursor (A) having a constituent unit represented by the formula (1), 15 to 25 parts by weight of a crosslinking agent (B) represented by the formula (2), and 2 to 5 parts by weight of a photosensitizer (C) generating acid upon irradiation of an actinic ray: wherein m is an integer of 1 or greater, and R is an aromatic group or an aliphatic group having a valency of 1 or higher. The positive photosensitive resin composition can be developed by using an aqueous solution of alkali metal carbonate, is capable of forming micropatterns, and has excellent thermal resistance and the like. A method for forming a positive pattern, and uses thereof are also provided.
Public/Granted literature
- US20090208868A1 Positive photosensitive resin composition and method for forming pattern Public/Granted day:2009-08-20
Information query
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