Invention Grant
US07666694B2 Method for manufacturing semiconductor laser device and semiconductor laser device
有权
半导体激光器件和半导体激光器件的制造方法
- Patent Title: Method for manufacturing semiconductor laser device and semiconductor laser device
- Patent Title (中): 半导体激光器件和半导体激光器件的制造方法
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Application No.: US11522356Application Date: 2006-09-18
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Publication No.: US07666694B2Publication Date: 2010-02-23
- Inventor: Masahide Kobayashi , Shotaro Kitamura
- Applicant: Masahide Kobayashi , Shotaro Kitamura
- Applicant Address: JP Kanagawa
- Assignee: NEC Electronics Corporation
- Current Assignee: NEC Electronics Corporation
- Current Assignee Address: JP Kanagawa
- Agency: Sughrue Mion, PLLC
- Priority: JP2005-276440 20050922
- Main IPC: H01L27/15
- IPC: H01L27/15 ; H01S5/22

Abstract:
An improved throughput can be presented, since an influence of the deterioration in crystallinity created in the epitaxial layer can be eliminated by a simple and easy method, and a semiconductor laser device having stabilized properties such as threshold current, slope efficiency, device life time and the like can be presented. A method for manufacturing a semiconductor laser device according to the present invention comprises: forming partially a diffraction grating on a surface of a semiconductor substrate or on a film on the surface of the semiconductor substrate; and forming a multiple-layered film by forming an epitaxial layer on a surface of the diffraction grating. The operation of forming the diffraction grating includes an operation of forming the diffraction grating so that a width of the diffraction grating in a direction that is orthogonal to a cavity direction of the semiconductor laser device is presented as a width equal to or longer than a sum of a mesa width and 30 μm.
Public/Granted literature
- US20070064759A1 Method for manufacturing semiconductor laser device and semiconductor laser device Public/Granted day:2007-03-22
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