Invention Grant
US07666703B2 Image sensor pixel having a lateral doping profile formed with indium doping 有权
具有由铟掺杂形成的横向掺杂分布的图像传感器像素

Image sensor pixel having a lateral doping profile formed with indium doping
Abstract:
An active pixel using a transfer gate that has a polysilicon gate doped with indium. The pixel includes a photosensitive element formed in a semiconductor substrate and an n-type floating node formed in the semiconductor substrate. An n-channel transfer transistor having a transfer gate is formed between the floating node and the photosensitive element. The pixel substrate has a laterally doping gradient doped with an indium dopant.
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