Invention Grant
- Patent Title: Solid-state image pickup element, method for manufacturing such solid-state image pickup element and optical waveguide forming device
- Patent Title (中): 固态摄像元件，这种固态摄像元件的制造方法以及光波导形成装置
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Application No.: US11912237Application Date: 2006-04-19
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Publication No.: US07666704B2Publication Date: 2010-02-23
- Inventor: Masaaki Suzuki , Michiyoshi Nagashima , Atsushi Tomozawa
- Applicant: Masaaki Suzuki , Michiyoshi Nagashima , Atsushi Tomozawa
- Applicant Address: JP Osaka
- Assignee: Panasonic Corporation
- Current Assignee: Panasonic Corporation
- Current Assignee Address: JP Osaka
- Agency: Hamre, Schumann, Mueller & Larson, P.C.
- Priority: JP2005-125244 20050422
- International Application: PCT/JP2006/308196 WO 20060419
- International Announcement: WO2006/115142 WO 20061102
- Main IPC: H01L21/00
- IPC: H01L21/00
Abstract:
A solid-state imaging device of the present invention includes a base 13, a plurality of photoelectric conversion portions 11 formed in a surface of the base 13, and an insulating film 18 formed above the base 13. Openings 18h are formed in the insulating film 18 so that each of the openings 18h is located above each of the photoelectric conversion portions 11. Optical waveguides 19 having a refractive index higher than that of the insulating film 18 are formed in each of the openings 18h. And the optical waveguides 19 are made of a composite material containing a resin 19a and inorganic particles 19b.
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