Invention Grant
US07666727B2 Semiconductor device having a laterally modulated gate workfunction and method of fabrication
失效
具有横向调制的栅极功能函数和制造方法的半导体器件
- Patent Title: Semiconductor device having a laterally modulated gate workfunction and method of fabrication
- Patent Title (中): 具有横向调制的栅极功能函数和制造方法的半导体器件
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Application No.: US11099190Application Date: 2005-04-04
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Publication No.: US07666727B2Publication Date: 2010-02-23
- Inventor: Brian Doyle , Scott A. Hareland , Mark Doczy , Robert S. Chau
- Applicant: Brian Doyle , Scott A. Hareland , Mark Doczy , Robert S. Chau
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Blakely, Sokoloff, Taylor & Zafman LLP
- Main IPC: H01L21/336
- IPC: H01L21/336 ; H01L21/4763

Abstract:
A transistor comprising a gate electrode formed on a gate dielectric layer formed on a substrate. A pair of source/drain regions are formed in the substrate on opposite sides of the laterally opposite sidewalls of the gate electrode. The gate electrode has a central portion formed on the gate dielectric layer and over the substrate region between the source and drain regions and a pair sidewall portions which overlap a portion of the source/drain regions wherein the central portion has a first work function and said pair of sidewall portions has a second work function, wherein the second work function is different than the first work function.
Public/Granted literature
- US20050221548A1 Semiconductor device having a laterally modulated gate workfunction and method of fabrication Public/Granted day:2005-10-06
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