Invention Grant
US07666742B2 Method of fabricating semiconductor devices having a recessed active edge
有权
制造具有凹入的有源边缘的半导体器件的方法
- Patent Title: Method of fabricating semiconductor devices having a recessed active edge
- Patent Title (中): 制造具有凹入的有源边缘的半导体器件的方法
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Application No.: US11462949Application Date: 2006-08-07
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Publication No.: US07666742B2Publication Date: 2010-02-23
- Inventor: Yong-Il Kim , Min-Hee Cho
- Applicant: Yong-Il Kim , Min-Hee Cho
- Applicant Address: KR Suwon-si, Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si, Gyeonggi-do
- Agency: Volentine & Whitt, PLLC
- Priority: KR10-2005-0071915 20050805
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
A semiconductor device having a recessed active edge is provided. The semiconductor devices include an isolation layer disposed in a substrate to define an active region. A gate electrode is disposed to cross over the active region. A source region and a drain region are disposed in the active region on both sides of the gate electrode. A recessed region is disposed under the gate electrode and on an edge of the active region adjacent to the isolation layer. A bottom of the recessed region may be sloped down toward the isolation layer. The gate electrode may further extend into and fill the recessed region. That is, a gate extension may be disposed in the recessed region. A method of fabricating the semiconductor device is also provided.
Public/Granted literature
- US20070029619A1 SEMICONDUCTOR DEVICES HAVING A RECESSED ACTIVE EDGE AND METHODS OF FABRICATING THE SAME Public/Granted day:2007-02-08
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