Invention Grant
US07666759B2 Method and system for high-speed, precise micromachining an array of devices
失效
用于高速，精确微加工器件阵列的方法和系统
- Patent Title: Method and system for high-speed, precise micromachining an array of devices
- Patent Title (中): 用于高速，精确微加工器件阵列的方法和系统
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Application No.: US11415653Application Date: 2006-05-02
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Publication No.: US07666759B2Publication Date: 2010-02-23
- Inventor: Bruce L. Couch , Jonathan S. Ehrmann , Joseph V. Lento , Shepard D. Johnson
- Applicant: Bruce L. Couch , Jonathan S. Ehrmann , Joseph V. Lento , Shepard D. Johnson
- Applicant Address: US MA Billerica
- Assignee: GSI Lumonics Corporation
- Current Assignee: GSI Lumonics Corporation
- Current Assignee Address: US MA Billerica
- Agency: Brooks Kushman P.C.
- Main IPC: H01L21/20
- IPC: H01L21/20
Abstract:
A method and system for high-speed, precise micromachining an array of devices are disclosed wherein improved process throughput and accuracy, such as resistor trimming accuracy, are provided. The number of resistance measurements are limited by using non-measurement cuts, using non-sequential collinear cutting, using spot fan-out parallel cutting, and using a retrograde scanning technique for faster collinear cuts. Non-sequential cutting is also used to manage thermal effects and calibrated cuts are used for improved accuracy. Test voltage is controlled to avoid resistor damage.
Public/Granted literature
- US20060205121A1 Method and system for high-speed, precise micromachining an array of devices Public/Granted day:2006-09-14
Information query
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