Invention Grant
US07667208B2 Technique for confining secondary electrons in plasma-based ion implantation
失效
在等离子体离子注入中限制二次电子的技术
- Patent Title: Technique for confining secondary electrons in plasma-based ion implantation
- Patent Title (中): 在等离子体离子注入中限制二次电子的技术
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Application No.: US11550140Application Date: 2006-10-17
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Publication No.: US07667208B2Publication Date: 2010-02-23
- Inventor: Rajesh Dorai
- Applicant: Rajesh Dorai
- Applicant Address: US MA Gloucester
- Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee Address: US MA Gloucester
- Main IPC: H01J37/244
- IPC: H01J37/244 ; H01J37/252

Abstract:
A technique for confining secondary electrons on a wafer is disclosed. In one particular exemplary embodiment, the technique may be realized as an apparatus and method for confining secondary electrons in plasma-based ion implantation. The apparatus and method may comprise a magnetic field portion of a magnetic field configuration placed under a target wafer for generating a magnetic field above the target wafer for confining secondary electrons on the target wafer. The apparatus and method may also comprise a magnetic field above the target wafer that is substantially parallel to an upper surface of the target wafer. The apparatus and method may additionally comprise a magnetic field portion comprising at least one of a plurality of coils, one or more current-carrying wires, and a plurality of magnets.
Public/Granted literature
- US20080087839A1 TECHNIQUE FOR CONFINING SECONDARY ELECTRONS IN PLASMA-BASED ION IMPLANTATION Public/Granted day:2008-04-17
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