Invention Grant
- Patent Title: Semiconductor nonvolatile storage element and method of fabricating the same
- Patent Title (中): 半导体非易失性存储元件及其制造方法
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Application No.: US11634042Application Date: 2006-12-05
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Publication No.: US07667252B2Publication Date: 2010-02-23
- Inventor: Shigeki Sakai , Kazuo Sakamaki
- Applicant: Shigeki Sakai , Kazuo Sakamaki
- Applicant Address: JP Tokyo JP Tokyo
- Assignee: National Institute of Advanced Industrial Science and Technology,SEIKO NPC Corporation
- Current Assignee: National Institute of Advanced Industrial Science and Technology,SEIKO NPC Corporation
- Current Assignee Address: JP Tokyo JP Tokyo
- Agency: Jordan and Hamburg LLP
- Priority: JP2001-90509 20010327
- Main IPC: H01L29/76
- IPC: H01L29/76

Abstract:
To provide a semiconductor nonvolatile storage device capable of applying distributed voltage efficiently to a ferroelectric capacitor in a semiconductor nonvolatile storage device having an MFMIS structure without enlarging a memory cell area and a method of fabricating the same, a ferroelectric nonvolatile storage element is constructed by a structure successively laminated with a first insulator layer (3), a first conductor layer (4), a ferroelectric layer (5) and a second conductor layer (6) on a channel region and is constructed by a structure having a third conductor (9) and a fourth conductor (10) respectively laminated on a source region and a drain region, in which the third conductor (9) and the fourth conductor (10) are opposed to each other via the first conductor layer (4) and a second insulator thin film (11).
Public/Granted literature
- US20080001194A1 Semiconductor nonvolatile storage element and method of fabricating the same Public/Granted day:2008-01-03
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