Invention Grant
- Patent Title: Two bit U-shaped memory structure and method of making the same
- Patent Title (中): 两位U形记忆体结构及制作方法
-
Application No.: US12139499Application Date: 2008-06-15
-
Publication No.: US07667262B2Publication Date: 2010-02-23
- Inventor: Wei-Ming Liao , Jer-Chyi Wang
- Applicant: Wei-Ming Liao , Jer-Chyi Wang
- Applicant Address: TW Kueishan, Tao-Yuan Hsien
- Assignee: Nanya Technology Corp.
- Current Assignee: Nanya Technology Corp.
- Current Assignee Address: TW Kueishan, Tao-Yuan Hsien
- Agent Winston Hsu
- Priority: TW97113009A 20080410
- Main IPC: H01L29/788
- IPC: H01L29/788

Abstract:
A memory structure includes: a substrate; a control gate positioned on the substrate; floating gates positioned at two sides of the control gate, wherein the floating gates have a U-shaped bottom embedded in the substrate; a first dielectric layer positioned between the control gate and the substrate; a second dielectric layer positioned between the U-shaped bottom of the floating gates and the substrate; a third dielectric layer positioned between the control gate and the floating gates; a local doping region positioned around the floating gates channel; and a source/drain doping region positioned in the substrate at a side of the floating gates.
Public/Granted literature
- US20090256189A1 TWO BIT U-SHAPED MEMORY STRUCTURE AND METHOD OF MAKING THE SAME Public/Granted day:2009-10-15
Information query
IPC分类: