Invention Grant
US07667266B2 Semiconductor device including active pattern with channel recess, and method of fabricating the same
失效
包括具有通道凹槽的有源图案的半导体器件及其制造方法
- Patent Title: Semiconductor device including active pattern with channel recess, and method of fabricating the same
- Patent Title (中): 包括具有通道凹槽的有源图案的半导体器件及其制造方法
-
Application No.: US12116821Application Date: 2008-05-07
-
Publication No.: US07667266B2Publication Date: 2010-02-23
- Inventor: Kyoung-Ho Jung , Makoto Yoshida , Jae-Rok Kahng , Chul Lee , Keun-Nam Kim
- Applicant: Kyoung-Ho Jung , Makoto Yoshida , Jae-Rok Kahng , Chul Lee , Keun-Nam Kim
- Applicant Address: KR Suwon-si, Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si, Gyeonggi-do
- Agency: Volentine & Whitt, PLLC
- Priority: KR10-2007-0055682 20070607
- Main IPC: H01L29/76
- IPC: H01L29/76 ; H01L29/94 ; H01L31/062 ; H01L31/113 ; H01L31/119 ; H01L29/00

Abstract:
A semiconductor device including an active pattern having a channel recess portion, and a method of fabricating the same, are disclosed. In one embodiment, the semiconductor device includes an active pattern including first active regions and a second active region interposed between the first active regions. The active pattern protrudes above a surface of a semiconductor substrate and includes a channel recess portion above the second active region and between the first active regions. A device isolation layer surrounds the active pattern and has a groove exposing side walls of the recessed second active region. A distance between opposing side walls of the first active regions exposed by the channel recess portion is greater than a distance between side walls of the groove. A gate pattern is located in the channel recess portion and extends along the groove.
Public/Granted literature
- US20080303085A1 SEMICONDUCTOR DEVICE INCLUDING ACTIVE PATTERN WITH CHANNEL RECESS, AND METHOD OF FABRICATING THE SAME Public/Granted day:2008-12-11
Information query
IPC分类: