Invention Grant
- Patent Title: Electronics tester with a signal distribution board and a wafer chuck having different coefficients of thermal expansion
- Patent Title (中): 具有信号分配板和具有不同热膨胀系数的晶片卡盘的电子测试仪
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Application No.: US12062988Application Date: 2008-04-04
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Publication No.: US07667475B2Publication Date: 2010-02-23
- Inventor: Steven C. Steps , Scott E. Lindsey , Kenneth W. Deboe , Donald P. Richmond, II , Alberto Calderon
- Applicant: Steven C. Steps , Scott E. Lindsey , Kenneth W. Deboe , Donald P. Richmond, II , Alberto Calderon
- Applicant Address: US CA Fremont
- Assignee: AEHR Test Systems
- Current Assignee: AEHR Test Systems
- Current Assignee Address: US CA Fremont
- Agency: Sonnenschein, Nath & Rosenthal LLP
- Agent Stephen M. De Klerk
- Main IPC: G01R31/02
- IPC: G01R31/02
Abstract:
The invention relates to a tester apparatus of the kind including a portable supporting structure for removably holding and testing a substrate carrying a microelectronic circuit. An interface on the stationary structure is connected to the first interface when the portable structure is held by the stationary structure and is disconnected from the first interface when the portable supporting structure is removed from the stationary structure. An electrical tester is connected through the interfaces so that signals may be transmitted between the electrical tester and the microelectronic circuit to test the microelectronic circuit.
Public/Granted literature
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