Invention Grant
US07669490B2 Apparatus and method for testing filters in a clean room 失效
在洁净室内测试过滤器的装置和方法

  • Patent Title: Apparatus and method for testing filters in a clean room
  • Patent Title (中): 在洁净室内测试过滤器的装置和方法
  • Application No.: US11661246
    Application Date: 2005-05-11
  • Publication No.: US07669490B2
    Publication Date: 2010-03-02
  • Inventor: Yasuhiro Yoshitome
  • Applicant: Yasuhiro Yoshitome
  • Applicant Address: JP Tokyo
  • Assignee: Taikisha Ltd.
  • Current Assignee: Taikisha Ltd.
  • Current Assignee Address: JP Tokyo
  • Agency: The Webb Law Firm
  • Priority: JP2004-248108 20040827
  • International Application: PCT/JP2005/008614 WO 20050511
  • International Announcement: WO2006/022051 WO 20060302
  • Main IPC: G01M19/00
  • IPC: G01M19/00 G01M3/20 B01D65/10
Apparatus and method for testing filters in a clean room
Abstract:
To provide a filter test apparatus that can easily and efficiently test parallel filters in a clean room, a plurality of filters for purifying air supplied into the room are disposed in parallel, and a moving frame oriented along the exit surfaces of a filter group is disposed in the clean room, in which the exit surfaces of the filter group are used as the ceiling surfaces or side surfaces of the room, so as to allow movement in the direction along the exit surfaces of the filter group in a direction orthogonal to the longitudinal direction of the moving frame. The moving frame is disposed so as to span opposing room walls and in a position near the exit surfaces of the filter group in the room. A filter test device is movably mounted on the moving frame in the longitudinal direction of the moving frame.
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