Invention Grant
- Patent Title: Apparatus for pattern replication with intermediate stamp
- Patent Title (中): 带有中间印章的图案复制装置
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Application No.: US11305157Application Date: 2005-12-19
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Publication No.: US07670127B2Publication Date: 2010-03-02
- Inventor: Bakak Heidari
- Applicant: Bakak Heidari
- Applicant Address: SE Malmo
- Assignee: Obducat AB
- Current Assignee: Obducat AB
- Current Assignee Address: SE Malmo
- Agency: Renner, Otto, Boisselle & Sklar, LLP
- Priority: EP05111920 20051209
- Main IPC: B29C59/00
- IPC: B29C59/00 ; B29B13/08
Abstract:
The invention relates to an imprint apparatus for carrying out a two-step process for transferring a pattern from a template to a target surface of a substrate. The apparatus works by creating an intermediate disc, e.g. from a flexible polymer stamp, by imprint from the template in a first imprint unit. A feeder device is then operated to feed the intermediate stamp to a second imprint unit, where it is used to make an imprint in a target surface of a substrate.
Public/Granted literature
- US20070134362A1 Apparatus for pattern replication with intermediate stamp Public/Granted day:2007-06-14
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