Invention Grant
- Patent Title: Pad conditioner, pad conditioning method, and polishing apparatus
- Patent Title (中): 垫调节剂,垫调理方法和抛光装置
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Application No.: US11463209Application Date: 2006-08-08
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Publication No.: US07670209B2Publication Date: 2010-03-02
- Inventor: Takashi Fujita
- Applicant: Takashi Fujita
- Applicant Address: JP Tokyo
- Assignee: Tokyo Seimitsu Co., Ltd.
- Current Assignee: Tokyo Seimitsu Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Roberts Mlotkowski Safran & Cole, P.C.
- Agent David S. Safran
- Priority: JP2005-246437 20050826
- Main IPC: B24B55/10
- IPC: B24B55/10

Abstract:
The present invention provides a pad conditioner for dressing a surface of a polishing pad which is used in a polishing apparatus for polishing works, comprising: a substrate disposed opposite to the polishing pad; a plurality of pellets removably attached to the substrate; and a plurality of linear elastic members which have tip ends and are implanted into the pellets, wherein upon contact of the tip ends of the linear elastic members with the polishing pad, the linear elastic members elastically deform, so that a pressure necessary for conditioning the pad is generated in order to maintain a change in conditioning capability within a predetermined range and have a wide margin for adjusting a height of the conditioner.
Public/Granted literature
- US20070077870A1 PAD CONDITIONER, PAD CONDITIONING METHOD, AND POLISHING APPARATUS Public/Granted day:2007-04-05
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