Invention Grant
US07670209B2 Pad conditioner, pad conditioning method, and polishing apparatus 有权
垫调节剂,垫调理方法和抛光装置

Pad conditioner, pad conditioning method, and polishing apparatus
Abstract:
The present invention provides a pad conditioner for dressing a surface of a polishing pad which is used in a polishing apparatus for polishing works, comprising: a substrate disposed opposite to the polishing pad; a plurality of pellets removably attached to the substrate; and a plurality of linear elastic members which have tip ends and are implanted into the pellets, wherein upon contact of the tip ends of the linear elastic members with the polishing pad, the linear elastic members elastically deform, so that a pressure necessary for conditioning the pad is generated in order to maintain a change in conditioning capability within a predetermined range and have a wide margin for adjusting a height of the conditioner.
Public/Granted literature
Information query
Patent Agency Ranking
0/0