Invention Grant
- Patent Title: Vacuum deposition apparatus of the winding type
- Patent Title (中): 卷绕式真空沉积设备
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Application No.: US11630761Application Date: 2006-02-14
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Publication No.: US07670433B2Publication Date: 2010-03-02
- Inventor: Nobuhiro Hayashi , Shin Yokoi , Isao Tada , Atsushi Nakatsuka
- Applicant: Nobuhiro Hayashi , Shin Yokoi , Isao Tada , Atsushi Nakatsuka
- Applicant Address: JP Kanagawa
- Assignee: Ulvac, Inc.
- Current Assignee: Ulvac, Inc.
- Current Assignee Address: JP Kanagawa
- Agency: Carothers & Carothers
- Priority: JP2005-039271 20050216
- International Application: PCT/JP2006/302550 WO 20060214
- International Announcement: WO2006/088024 WO 20060824
- Main IPC: C23C16/00
- IPC: C23C16/00 ; C23C14/00

Abstract:
The problem solved by this Invention is to provide a vacuum evaporation deposition method of the winding type and a vacuum evaporation deposition apparatus of the winding type which can form a metal film on a base film made of single layer plastic film without thermal deformation and with superior productivity. To solve the above problem, there are provided an electron beam irradiator 21 for irradiating an electron beam onto a film material 12 arranged between an unwinding roller 13 and a deposition source 16; an auxiliary roller 18 for guiding the film 12 in contact with the deposited metal layer and arranged between a can roller 14 and a winding roller 15; a DC bias power source 22 for applying a DC voltage between the auxiliary roller 18 and the can roller 14; electricity removing unit 23 for removing electricity from the film 12 and arranged between the can roller 14 and the winding roller 15. The electricity removing unit 23 is a plasma generating source of the DC dipolar discharge type wherein one of its electrodes is earthed.
Public/Granted literature
- US20070259105A1 Vacuum Deposition Apparatus of the Winding Type Public/Granted day:2007-11-08
Information query
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