Invention Grant
- Patent Title: Method to control an atmosphere between a body and a substrate
- Patent Title (中): 控制身体和基质之间气氛的方法
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Application No.: US11231580Application Date: 2005-09-21
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Publication No.: US07670534B2Publication Date: 2010-03-02
- Inventor: Yeong-Jun Choi , Byung-Jin Choi
- Applicant: Yeong-Jun Choi , Byung-Jin Choi
- Applicant Address: US TX Austin
- Assignee: Molecular Imprints, Inc.
- Current Assignee: Molecular Imprints, Inc.
- Current Assignee Address: US TX Austin
- Agent Laura C. Robinson
- Main IPC: B28B11/00
- IPC: B28B11/00 ; C23F1/00 ; B41C1/06
Abstract:
The present invention is directed towards a method of controlling an atmosphere about a substrate, the method including, inter alia, positioning a body a distance from a surface of the substrate, the body having a wall coupled thereto placed in a position to create a flow resistance of a fluid between first and second regions of the substrate; and altering the position of the wall such that when a magnitude of the distance between the body and the surface of the substrate is decreased, a probability of the wall contacting the substrate is minimized.
Public/Granted literature
- US20070063384A1 Method to control an atmostphere between a body and a substrate Public/Granted day:2007-03-22
Information query
