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US07670647B2 Method for depositing zinc oxide coatings on flat glass 失效
在平板玻璃上沉积氧化锌涂层的方法

Method for depositing zinc oxide coatings on flat glass
Abstract:
A method of forming zinc oxide films on a heated, moving glass substrate utilizes a gaseous precursor mixture comprising an alkyl zinc compound chelated by at least one tridentate ligand, an oxygen-containing compound, and one or more inert carrier gases.
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