Invention Grant
US07670863B2 Method of fabricating complementary metal oxide silicon image sensor
有权
互补金属氧化物硅图像传感器的制造方法
- Patent Title: Method of fabricating complementary metal oxide silicon image sensor
- Patent Title (中): 互补金属氧化物硅图像传感器的制造方法
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Application No.: US11646805Application Date: 2006-12-27
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Publication No.: US07670863B2Publication Date: 2010-03-02
- Inventor: Jin Han Kim
- Applicant: Jin Han Kim
- Applicant Address: KR Seoul
- Assignee: Dongbu Electronics Co., Ltd.
- Current Assignee: Dongbu Electronics Co., Ltd.
- Current Assignee Address: KR Seoul
- Agency: The Law Offices of Andrew D. Fortney
- Agent Andrew D. Fortney
- Priority: KR10-2005-0131423 20051228
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
Provided is a method of fabricating a complementary metal oxide silicon image sensor. The method includes: applying a passivation oxide and a passivation nitride after forming a pad; selectively removing the passivation nitride in a pad region and a pixel region by a photolithography process, and performing a first cleaning process; performing a hydrogen anneal process; opening the pad by removing the passivation oxide in the pad region and performing a second cleaning process; applying a pad protective layer; performing a color filter array process, a planarization process, and a microlens process after the applying of the pad protective layer; and removing the pad protective layer in the pad region.
Public/Granted literature
- US20070148806A1 Method of fabricating complementary metal oxide silicon image sensor Public/Granted day:2007-06-28
Information query
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