Invention Grant
US07670867B2 Method for manufacturing CMOS image sensor having microlens therein with high photosensitivity
有权
用于制造具有高光敏性的具有微透镜的CMOS图像传感器的方法
- Patent Title: Method for manufacturing CMOS image sensor having microlens therein with high photosensitivity
- Patent Title (中): 用于制造具有高光敏性的具有微透镜的CMOS图像传感器的方法
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Application No.: US11242817Application Date: 2005-10-03
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Publication No.: US07670867B2Publication Date: 2010-03-02
- Inventor: Chang-Young Jeong , Dae-Ung Shin , Hong-Ik Kim
- Applicant: Chang-Young Jeong , Dae-Ung Shin , Hong-Ik Kim
- Agency: McAndrews, Held & Malloy, Ltd.
- Priority: KR2003-5765 20030129; KR2003-27019 20030429
- Main IPC: H01L21/00
- IPC: H01L21/00

Abstract:
The method for manufacturing a CMOS image sensor is employed to prevent bridge phenomenon between adjacent microlenses by employing openings between the microlenses. The method includes the steps of: preparing a semiconductor substrate including isolation regions and photodiodes therein obtained by a predetermined process; forming an interlayer dielectric (ILD), metal interconnections and a passivation layer formed on the semiconductor substrate in sequence; forming a color filter array having a plurality of color filters on the passivation layer; forming an over-coating layer (OCL) on the color filter array by using a positive photoresist or a negative photoresist; forming openings in the OCL by patterning the OCL by using a predetermined mask; and forming dome-typed microlenses on a patterned OCL.
Public/Granted literature
- US20060019426A1 Method for manufacturing CMOS image sensor having microlens therein with high photosensitivity Public/Granted day:2006-01-26
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