Invention Grant
- Patent Title: Method of fabricating a phase-change memory
- Patent Title (中): 制造相变存储器的方法
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Application No.: US12187345Application Date: 2008-08-06
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Publication No.: US07670871B2Publication Date: 2010-03-02
- Inventor: Yi-Chan Chen , Wen-Han Wang
- Applicant: Yi-Chan Chen , Wen-Han Wang
- Agency: Quintero Law Office
- Priority: TW95129774A 20060814
- Main IPC: H01L21/06
- IPC: H01L21/06

Abstract:
A phase-change memory comprises a bottom electrode formed on a substrate. A first isolation layer is formed on the bottom electrode. A top electrode is formed on the isolation layer. A first phase-change material is formed in the first isolation layer, wherein the top electrode and the bottom electrode are electrically connected via the first phase-change material. Since the phase-change material can have a diameter less than the resolution limit of the photolithography process, an operating current for a state conversion of the phase-change material pattern may be reduced so as to decrease a power dissipation of the phase-change memory device.
Public/Granted literature
- US20080311699A1 PHASE-CHANGE MEMORY AND FABRICATION METHOD THEREOF Public/Granted day:2008-12-18
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