Invention Grant
- Patent Title: Semiconductor processing methods, and methods of forming flash memory structures
- Patent Title (中): 半导体处理方法和形成闪存结构的方法
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Application No.: US11851484Application Date: 2007-09-07
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Publication No.: US07670905B2Publication Date: 2010-03-02
- Inventor: Mark Kiehlbauch
- Applicant: Mark Kiehlbauch
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John P.S.
- Main IPC: H01L29/788
- IPC: H01L29/788

Abstract:
Some embodiments include methods of reflecting ions off of vertical regions of photoresist mask sidewalls such that the ions impact foot regions along the bottom of the photoresist mask sidewalls and remove at least the majority of the foot regions. In some embodiments, trenches may be formed adjacent the photoresist mask sidewalls in a material that is beneath the photoresist mask. Another material may be formed to have projections extending into the trenches. Such projections may assist in anchoring said other material to the material that is beneath the photoresist mask. In some embodiments, the photoresist mask is utilized for patterning flash memory structures. Some embodiments include semiconductor constructions having materials anchored to underlying materials through fang-like projections.
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