Invention Grant
- Patent Title: Methods for purifying alkane liquids
- Patent Title (中): 烷烃液体净化方法
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Application No.: US11520319Application Date: 2006-09-13
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Publication No.: US07671247B2Publication Date: 2010-03-02
- Inventor: Robert Clayton Wheland , Leo Ernest Manzer , Sheng Peng
- Applicant: Robert Clayton Wheland , Leo Ernest Manzer , Sheng Peng
- Applicant Address: US DE Wilmington
- Assignee: E.I. du Pont de Nemours and Company
- Current Assignee: E.I. du Pont de Nemours and Company
- Current Assignee Address: US DE Wilmington
- Agent Gail D. Tanzer
- Main IPC: C07C7/163
- IPC: C07C7/163
Abstract:
Methods for purifying liquid alkanes are provided. The methods produce alkanes having low absorbance, particularly at 193 nm. The alkane liquids are useful as immersion liquids in photomicrolithography employed for production of electronic circuits.
Public/Granted literature
- US20080064907A1 Methods for purifying alkane liquids Public/Granted day:2008-03-13
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