Invention Grant
- Patent Title: Deep bitline implant to avoid program disturb
- Patent Title (中): 深位线植入,以避免程序干扰
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Application No.: US11646157Application Date: 2006-12-26
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Publication No.: US07671405B2Publication Date: 2010-03-02
- Inventor: Timothy Thurgate , Yi He , Ming-Sang Kwan , Zhizheng Liu , Xuguang Wang
- Applicant: Timothy Thurgate , Yi He , Ming-Sang Kwan , Zhizheng Liu , Xuguang Wang
- Applicant Address: US CA Sunnyvale
- Assignee: Spansion LLC
- Current Assignee: Spansion LLC
- Current Assignee Address: US CA Sunnyvale
- Agency: Eschweiller & Associates, LLC
- Main IPC: H01L27/112
- IPC: H01L27/112 ; H01L21/336

Abstract:
A method of forming at least a portion of a dual bit memory core array upon a semiconductor substrate, the method comprising performing front end processing, performing a first bitline implant, or pocket implants, or both into the first bitline spacings to establish buried first bitlines within the substrate, depositing a layer of the spacer material over the charge trapping dielectric and the polysilicon layer features, forming a sidewall spacer adjacent to the charge trapping dielectric and the polysilicon layer features to define second bitline spacings between adjacent memory cells, performing a deep arsenic implant into the second bitline spacings to establish a second bitline within the structure that is deeper than the first bit line, removing the sidewall spacers and performing back end processing.
Public/Granted literature
- US20080153274A1 Deep bitline implant to avoid program disturb Public/Granted day:2008-06-26
Information query
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