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US07671409B2 Wide gap semiconductor power device with temperature independent resistivity due to channel region resistivity having negative temperature dependence 有权
具有温度独立电阻率的宽间隙半导体功率器件由于沟道区电阻率具有负温度依赖性

Wide gap semiconductor power device with temperature independent resistivity due to channel region resistivity having negative temperature dependence
Abstract:
A field-effect transistor power device includes a source electrode, a drain electrode, a wide gap semiconductor including a channel region and a drift region, the channel region and the drift region forming a series current path between the source electrode and the drain electrode, a gate insulating film that covers the channel region, and a gate electrode formed on the gate insulating film. In the series current path which is electrically conducting when the field-effect transistor power device is in an ON state, any region other than the channel region has an ON resistance exhibiting a positive temperature dependence, and the channel region has an ON resistance exhibiting a negative temperature dependence. A ratio ΔRon/Ron(−30° C.) is 50% or less.
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